· TMX Advanced Engineering- 40h
· TMX Basics- 40h
· TMX Advanced Engineering Recipe- 40h
· TMX Advanced Technician/Engineering- 80h
· High Flow Anneal/Alloy- 8h
|JRS Training Courses
JRS provides detailed instruction on the operation and maintenance of Thermco and ASM furnaces. Courses may be tailored to the customer's needs and are designed for engineers, technicians and/or operators including recipe writing, evaluation and process management, profile or maintenance routines. Classes can be scheduled at JRS's training facilities using actual OEM furnaces or around shift schedules at the Customer's site. Modular instruction is also available to concentrate on specific problem areas or system components such as recipe writing, evaluation and process management, and profile or maintenance routines.
JRS training classes offer the technician and engineer the opportunity to review the Thermco TMX 9K/10K/12K/Semy system functions and schematics. More importantly for the benefit of production schedules, they afford the opportunity to have "hands-on", "worse case" scenarios at our facility with actual equipment during lab sessions without the fear of damaging customer's cost intensive on-site product and equipment.
The students who attend these classes are here to learn, in depth, the ins and outs of the TMX equipment, especially in the 80-hour course. Our goal is to provide the customer the very best training available on our equipment assuring the investment in their employee is worthwhile.
JRS now offers specialized classes for customers with limited needs. For on-site training, quotes are available upon request. Other class topics may be also available. Please feel free to contact us.
Due to class demand, it is requested reservations for each student's
date preference be made as early as possible. Purchase Orders must be
issued and confirmed within 20 business days of reservation date. Postponements
must be submitted in writing. Purchase Orders and/or Reservations are
non-cancelable/non-postponeable twenty-one (21) days prior to start of
scheduled class. If during this twenty-one (21) day period prior to the
start of the class a scheduled student cannot attend, a substitute student
is recommended and encouraged. "No Shows" will be billed.
| TMX Advanced Engineering
Course- 40 hours - Thermco 9K/10K/12K/SEMY
|TMX Basics Course- 40
hours - Thermco 9K/10K/12K/SEMY
This elementary course covers TMX operation characteristics and calibrations. No prerequisites for this course are required. A general overview of the hardware, computer system, and required preventive maintenance/calibrations will be emphasized. Trouble shooting of specific systems is discussed. The course will consist of a 50/50 mix of class instruction and system demonstration. Note: Any company specific systems options/hardware can be included upon request. The necessary equipment required for this course is on-site at the JRS Training Facility.
Advanced Engineering Recipe Course- 40h - Thermco 9K/10K/12K/SEMY
This course covers TMX recipe operations and characteristics. The course can be conducted at the JRS Training Facility or "on-site". On-site courses require an operational 9K or 10K TMX computer and, preferably, a Thermco furnace (atmospheric and CVD types). A maintenance or diagnostic terminal is also recommended. The JRS Advanced Engineering Class (40-Hour Course) and a minimum of nine (9) months of operations with the system are recommended prerequisites to this class.
This course begins with a general overview of the furnace and computer systems. System commands and their functions are presented as well as recipe programming and troubleshooting basics. Specific recipe types (atmospheric, CVD, Profiles, etc.) will be reviewed and/or created each day. Additional information on process troubleshooting of the furnace, preventive maintenance and calibrations and PID control theory can be included. Results of this course include an improved understanding of Thermco TMX recipes. Typically, recipe processing times can be reduced resulting in improved wafer throughput. The course will consist of a 70/30 mix of class instruction and recipe demonstrations.
Technician/Engineering Course - 80 hours - Thermco 9K/10K/12K/SEMY
This class covers both TMX 9K, 10K, 12K and Semy D-Mux Systems. All equipment necessary to cover all aspects of the furnace systems are available and on site at the JRS Training Facility. Students must have an operating knowledge of the system and/or attended a TMX Basics course.
In this course of instruction, all parts of the operating systems are covered in detail and complete schematic analysis of all PC boards is presented. During lab exercises, a normal operating system is set up and measurements taken then recorded on all pertinent circuits of the system being covered. After a functional operating system is covered in detail, students will be required to troubleshoot instructor-installed problems on actual systems. The JGA Continuous Furnace Monitoring System can be utilized throughout the class.
|High Flow Anneal/Alloy
Course - 8 hours - Thermco 9K/10K/12K/SEMY:
This course covers the SVG/Thermco Hi-Flow Hydrogen (HFHA) Anneal/Alloy
operational characteristics, troubleshooting and calibrations. The course
requires all components of the HFHA system to be available for review
and discussion. An operational 9K or 10K Thermco HFHA Furnace and Maintenance
CRT is preferred to verify system operations, but is not mandatory.
Complete Overview of the Thermco Gas Control Systems - 4 hours
This course is offered on an as needed basis only and may be held on-site.