Training Courses

Thermco TMX Training

· TMX Advanced Engineering- 40h
· TMX Basics- 40h
· TMX Advanced Engineering Recipe- 40h
· TMX Advanced Technician/Engineering- 80h
· High Flow Anneal/Alloy- 8h
ASM PECVD Training

· ASM PRI Loader Maintenance- 40h
· ASM PECVD-Maintenance- 32h



JRS Training Courses

JRS provides detailed instruction on the operation and maintenance of Thermco and ASM furnaces. Courses may be tailored to the customer's needs and are designed for engineers, technicians and/or operators including recipe writing, evaluation and process management, profile or maintenance routines. Classes can be scheduled at JRS's training facilities using actual OEM furnaces or around shift schedules at the Customer's site. Modular instruction is also available to concentrate on specific problem areas or system components such as recipe writing, evaluation and process management, and profile or maintenance routines.

 

Thermco TMX Training

JRS training classes offer the technician and engineer the opportunity to review the Thermco TMX 9K/10K/12K/Semy system functions and schematics. More importantly for the benefit of production schedules, they afford the opportunity to have "hands-on", "worse case" scenarios at our facility with actual equipment during lab sessions without the fear of damaging customer's cost intensive on-site product and equipment.

These classes are held in Lanagan, Missouri.

The students who attend these classes are here to learn, in depth, the ins and outs of the TMX equipment, especially in the 80-hour course. Our goal is to provide the customer the very best training available on our equipment assuring the investment in their employee is worthwhile.

JRS now offers specialized classes for customers with limited needs. For on-site training, quotes are available upon request. Other class topics may be also available. Please feel free to contact us.

Requirements:

Due to class demand, it is requested reservations for each student's date preference be made as early as possible. Purchase Orders must be issued and confirmed within 20 business days of reservation date. Postponements must be submitted in writing. Purchase Orders and/or Reservations are non-cancelable/non-postponeable twenty-one (21) days prior to start of scheduled class. If during this twenty-one (21) day period prior to the start of the class a scheduled student cannot attend, a substitute student is recommended and encouraged. "No Shows" will be billed.

 

TMX Advanced Engineering Course- 40 hours - Thermco 9K/10K/12K/SEMY
Day 1:  
Introduction  

· Overview of TMX System. Covers interconnects, parts layout, and all tube components.

Tables  

· Covers required tables used for proper operation of the TMX system and how to access and write them.

Maintenance CRT  

· How to access and interpret data and how to use OP codes.

Day 2:
PID Control

· Theory of PID control (PID control as it is used in the TMX system).

PID Control Lab

· This lab exercise familiarizes the students with the uses of the furnace control algorithm and how to determine the proper gain coefficients for optimum temperature control.

Day 3:
PID Control Lab

Continued.

Temperature Control Theory.

· During this session (which is block diagram in depth), the proper uses of the various recipe commands are stressed.

Temperature Control Lab.
Day 4:
Gas Control Theory and Schematic Analysis in Block Diagram Form

· Proper use of recipe commands and an explanation of all events, event delays, and the many pitfalls that can occur due to poor recipe structure. The path of a recipe command through the program and hardware is fully discussed.

CVD Control Theory

· In this lesson, we cover the interaction of recipe commands with the hardware. All events and their reactions are covered in detail to enable students to write more meaningful recipes and sub routines.

Day 5:
CVD Control Lab

· In this lab, the proper interaction of recipe commands with the countdown timer circuit, low setpoint alarm, high setpoint alarm and procedure errors are stressed. The automatic results of each of the alarms are covered in detail to better enable the students to construct proper abort routines to shut down in an orderly fashion.

Boat Loader Theory and Events Associated with the Boatloader Circuitry

· Covers single step, battery, and wafers absent events and how they are used.

Additional Data:
The JGA Continuous Furnace Monitoring System can be used throughout the class.
Depending on the makeup of the class, an optional session on high flow anneal systems will be presented.

 

TMX Basics Course- 40 hours - Thermco 9K/10K/12K/SEMY

This elementary course covers TMX operation characteristics and calibrations. No prerequisites for this course are required. A general overview of the hardware, computer system, and required preventive maintenance/calibrations will be emphasized. Trouble shooting of specific systems is discussed. The course will consist of a 50/50 mix of class instruction and system demonstration. Note: Any company specific systems options/hardware can be included upon request. The necessary equipment required for this course is on-site at the JRS Training Facility.

Day 1:
Complete Introduction to the Basics of the TMX system.

· An overview of the entire system hardware (mechanical and electrical)
· Identification and location of major system components as well as PC boards are shown.
· The MUX computer's basic operations are detailed for an operational understanding of the system.
· The tube computer, I/O boards, operator panel, and their interfaces will be covered to show all electrical hardware interconnect and operator/technician interactions with the system.
· Maintenance (diagnostic) CRT operations and diagnostics.

Day 2:
Temperature Control System:

· The temperature control system hardware (temp board, element trip, redundant O/T, firing card, breakers, etc.) is shown, and calibrations detailed and demonstrated.
· Thermocouple types and their uses/placement in the system
· Troubleshooting of the temp system using the MCRT and computer tables will be covered. Common temp system problems are demonstrated.
· Element voltage and current and the proper method of measurements
· Theory of profiling the temperature system, its use, and maintenance

Day 3:
Gas Control System

· The gas system hardware overview
· Hardware and its relation to the gas tables are detailed.
· Gas control board calibrations and troubleshooting (using MCRT) are shown.

Gas Interface System

· Atmospheric
1. Standard atmospheric type gas systems setup (configurations) and associated hardware
2. Additional atmospheric type hardware (pyrogenic specific, bubblers, etc.) is covered.
3. Atmospheric specific interlocks and calibrations are detailed and demonstrated.

Day 4:
Gas Interface System (Continued)

· CVD
1. CVD type gas systems and interfaces to their respective hardware
2. CVD specific interlock and calibrations are detailed and demonstrated.
3. Pump down sequence
4. Closed loop pressure control

Day 5:
Boat Control Systems

· Boat systems types (A, D, E style) can be covered.
· Specific boat type calibrations (hardware and software) are demonstrated.
· Boat system troubleshooting and maintenance
· Graduation

 

TMX Advanced Engineering Recipe Course- 40h - Thermco 9K/10K/12K/SEMY

This course covers TMX recipe operations and characteristics. The course can be conducted at the JRS Training Facility or "on-site". On-site courses require an operational 9K or 10K TMX computer and, preferably, a Thermco furnace (atmospheric and CVD types). A maintenance or diagnostic terminal is also recommended. The JRS Advanced Engineering Class (40-Hour Course) and a minimum of nine (9) months of operations with the system are recommended prerequisites to this class.

This course begins with a general overview of the furnace and computer systems. System commands and their functions are presented as well as recipe programming and troubleshooting basics. Specific recipe types (atmospheric, CVD, Profiles, etc.) will be reviewed and/or created each day. Additional information on process troubleshooting of the furnace, preventive maintenance and calibrations and PID control theory can be included. Results of this course include an improved understanding of Thermco TMX recipes. Typically, recipe processing times can be reduced resulting in improved wafer throughput. The course will consist of a 70/30 mix of class instruction and recipe demonstrations.

Day 1:
Complete introduction to the TMX system - 8 Hours

· A brief overview of the system hardware
· The MUX computer's basic operations are detailed for an operational understanding of the system.
· The tube computer, I/O boards, operator panel, and their interfaces will be covered to show all electrical hardware interconnect and operator/technician interactions with the system.

Day 2:
Maintenance (diagnostic) CRT operations and its use in troubleshooting recipes - 3 Hours
Review of system commands and their specifics - 2 Hours
Recipe basics, subroutines and "recovery" routines - 3 Hours
Day 3:
System profiling - 8 Hours.

· Profiling concepts, procedures and troubleshooting
· Profiling recipes, flat profiles and tilt profiles

Day 4:
Atmospheric systems - 8 Hours.

· Review of atmospheric gas systems; to include interlocks and specific hardware
· Recipe review
· Anneal/alloy specific processes can be included.

Day 5:
CVD Systems - 8 Hours.

· Review of CVD Systems
· CVD operational procedures (pump down) and interlocks
· Recipe review

This is the basic course structure. Specific requirements can be added or refined based on company or class needs. Pre-existing recipes are encouraged to identify problems and improvements in basic structure. Any modifications to pre-existing recipes can be verified on existing systems to ensure compatibility.

 

TMX Advanced Technician/Engineering Course - 80 hours - Thermco 9K/10K/12K/SEMY

This class covers both TMX 9K, 10K, 12K and Semy D-Mux Systems. All equipment necessary to cover all aspects of the furnace systems are available and on site at the JRS Training Facility. Students must have an operating knowledge of the system and/or attended a TMX Basics course.

In this course of instruction, all parts of the operating systems are covered in detail and complete schematic analysis of all PC boards is presented. During lab exercises, a normal operating system is set up and measurements taken then recorded on all pertinent circuits of the system being covered. After a functional operating system is covered in detail, students will be required to troubleshoot instructor-installed problems on actual systems. The JGA Continuous Furnace Monitoring System can be utilized throughout the class.

Week 1 - Day 1:
Complete introduction to the TMX systems - 6 Hours.

· This is an overview of the complete system and covers power input and all the primary power circuits, MUX computer and its uses, tube computer and what it does, and location of all PC boards in the system and their function.

The Tube Computer - 2 Hours.

· Power supplies and their uses, the CPU and memory, the interface PCB, and the Operator Control Panel and Operator Interface PCB will be covered.

Week 1 - Day 2:
Component Location - 1 Hour.

· Identify and locate all parts of the operating tube computer including all power supplies.

Theory of PID Control - 3 Hours.

· Introduction to PID control - all types of control will be introduced and PID control will be covered in depth. Thermocouple theory - the types of thermocouples used in the system and their millivolt outputs will be covered.

PID Control - 2 Hours.

· PID control as it is used in the TMX system.

PID Control Lab Exercise - 2 Hours.

· Students will make entries into the PID control algorithm and study the power reactions as these entries are changed. Both Type R and Type B systems will be covered. Using different sets of numbers in the FCA coefficient tables, students will set various temperatures in the furnace and observe the effects of the PID control system.

Week 1 - Day 3:
Continuation of PID Control Lab - 4 Hours.
Temperature Control System - 4 Hours.

· Theory and schematic analysis of the Temperature Control System. Both, 60 Hz and 120HZ firing circuit will be covered. Element Breaker PCB and Redundant Excess Temperature PCB will be covered in detail. Use of the diagnostic CRT as it applies to temperature will be covered.

Week 1 - Day 4:
Temperature System Lab - 6 Hours

· A normal operating system will be analyzed and all pertinent measurements will be taken and recorded. Element voltage and current plus the proper methods of measuring them will be covered. Temperature boards will be placed on extender boards then signals measured and recorded.

Temperature System Troubleshooting - 2 Hours

· Students will be required to troubleshoot instructor-installed problems in the temperature system. After each problem has been isolated, determination of the best method to find a problem will be discussed.

Week 1 - Day 5:

Continuation of Temperature Troubleshooting - 8 Hours

 

Week 2 - Day 1:
Gas Control System - 5 Hours

· Gas Control PCB theory of operation and schematic analysis using the diagnostic CRT with the Gas Control System. Theory and schematic analysis of the Atmospheric Gas Interface PCB.

Gas Control PCB Lab - 3 Hours

· Set up all adjustments for Gas Control PCB. Setting up an atmospheric gas control table and ensuring that it will work. This lab will require students to look at a gas system and a set-up table to control that system.

Week 2 - Day 2:
Gas Interface PCB Lab Atmospheric - 3 Hours

· Students will be required to properly set up the Gas Interface PCB so that all safeties match the gas tables that have been previously entered into the system. Students will then be required to write a simple recipe to check their work.

Troubleshooting Gas Control System - 5 Hours

· Instructor-installed problems will be isolated and corrected. Discussions will be held after each session to cover best known methods of problem tracking.

Week 2 - Day 3:
Micro CVD Interface PCB - 4 Hours

· Theory and schematic analysis of CVD interface. Gas tables to properly operate CVD system will be covered. Pump down timer circuit will be covered in detail.

CVD Interface Pump Down Timer Lab - 2 Hours

· Students will be required to make a complete check of the pump down timer circuit. Measurements will be taken at each step change to ensure students understand exactly how the timer works and the reasons for the different step changes.

CVD Gas Tables - 2 Hours

· A conference to instruct students in the proper configuration of gas tables and why exact sequences are so important. Also covers the use of diagnostic CRT to troubleshoot CVD systems.

Week 2 - Day 4:
CVD Interface Lab - 4 Hours

· Students will be given a schematic of a gas system and will be required to set up a gas control table that will run the systems without process error. After the system is running properly, instructor will install problems for students to troubleshoot.

Boat Loaders - 3 Hours

· Schematic analysis and theory of operation of boatloader system. A, D, BT-1 and E style boatloaders will be covered.

Boat Loader Lab - 1 Hour

· Boatloader tables will be covered and the proper method of calibrating the different types of boatloaders. Typical problems will be discussed and troubleshooting session will be held.

Week 2 - Day 5:
Continuation of Boatloader Lab - 2 Hours
Discussion of JGA CFM3 System - 2 Hours
Class Review and Wrap-Up - 2 Hours
Graduation

 

High Flow Anneal/Alloy Course - 8 hours - Thermco 9K/10K/12K/SEMY:

This course covers the SVG/Thermco Hi-Flow Hydrogen (HFHA) Anneal/Alloy operational characteristics, troubleshooting and calibrations. The course requires all components of the HFHA system to be available for review and discussion. An operational 9K or 10K Thermco HFHA Furnace and Maintenance CRT is preferred to verify system operations, but is not mandatory.
There are no prerequisites to this course, but a basic understanding of Thermco furnaces and their operation influences the effectiveness of this class.

Complete Overview of the Thermco Gas Control Systems - 4 hours

An overview of the typical gas system
Identification and location of the gas system hardware and relationship to the gas tables are detailed.
Maintenance (diagnostic) CRT operations and gas system diagnostics.
Procedures for gas control board calibrations and troubleshooting (using MCRT) are shown.
Hi-Flow H2 Alloy/Anneal System - 4 hours
Typical alloy/anneal configurations.
Alloy/anneal operations. To include recipe review and alarm recovery.
Gas interface board (GIB) analysis. Review of all aspects of the GIB, purging, safety, valve sequencing, interlocks, calibration, troubleshooting, and gas interface operational requirements.
Note: Any company specific system options/hardware can be included upon request.

This course is offered on an as needed basis only and may be held on-site.
Please call to determine pricing and scheduling availability.

 

ASM PECVD TRAINING

JRS has been selected by ASM America, Inc., to provide service, technical support, and training on the ASM PECVD Systems; the Micon III, Micon V/DTC, SATCI, and SATCII Controllers; Chemical Vapor Etcher, SF-50, and the DFS 210 and 250 Diffusion Furnaces.

All ASM Training is performed at the customer's site.
Purchase Orders must be issued and confirmed within 30 days of reservation date.
Class limit is five (5) students to facilitate more one-on-one instruction.
All cancellations must be submitted in writing. Purchase Orders and/or Reservations are non-cancelable/non-postponeable twenty-one (21) days prior to start of scheduled class. If during this twenty-one (21) day period prior to class a scheduled student cannot attend, a substitute student is recommended and encouraged. "No Shows" will be billed. Terms: Net 30 (any variation to these terms may result in price differentials).
Prices are subject to change without notice.

Please call 602-453-3723 for reservations.

 

ASM PRI Loader Maintenance Course- 40 hours - PRI Loader 5100/5102

This five-day course will provide a thorough description of the PRI 5100/5102 tube loader/wafer loader system. The student will learn how to program the robots and to make mechanical software adjust-meets to correct or change robot operation. Routine maintenance and troubleshooting will also be taught.
Prerequisites:
Maintenance Personnel and Equipment Engineers with technical electronics background. Knowledge of BASIC and DOS is very beneficial.
Subjects Covered:

· System Configuration
· Routine Maintenance
· System Controller
· Mechanical Adjustments
· Software Control
· Application Software Changes
· Plasma System Interface
· Other Available Options

Objectives:
Upon completion of course, the student will be able to:

1. Start up and configure a PRI System.
2. Recognize and correct operational errors.
3. Modify application programs.
4. Correct problems with furnace interface.
5. Perform periodic maintenance.
6. Recognize problems that require further service assistance.

Please Note:
Class limit is five (5) students to facilitate more one-on-one instruction.
Please notify instructor at beginning of class as to your specific equipment needs.

Please call 602-453-3723 for reservations.

 

ASM PECVD-Maintenance Course - 32 hours

This course provides the student with a thorough understanding of the PECVD-3A System (including dual frequency, if applicable) and its maintenance requirements. The student will learn advanced system theories and practice the procedures for adjustment, calibration and troubleshooting of all accessible mechanical, electromechanical and electronic parts.
Prerequisites:
Maintenance Personnel and Equipment Engineers with a good technical background, such as experience in operating and maintaining other electromechanical equipment.
Subjects Covered:

· Source Section
· Vacuum Theory
· Furnace
· Process Principles
· Loader (Type To Be Specified)
· Transporter (Optional)
· Plasma Generator (2.5kW) - if applicable
· Dual Frequency Theory and Operation - if applicable
· SATC-1 D, SATC-1 E, SATC-2 ATC - as required

Objectives:
Upon completion of course, the student will be able to:

· Prepare, start-up and operate a PECVD-3A System for production runs.
· Respond to system emergencies correctly and efficiently. Handle error situations appropriately whether they are of a mechanical, electromechanical, electronic, or chemical nature.
· Describe the relationship between the system subassemblies.
· Perform the system mechanical and electronic adjustments.
· Correctly identify a malfunction on the system and take appropriate corrective action.
· List the major preventive maintenance tasks.